The robots have been deployed in multiple advanced wafer fabs around the world. Dextro enables accurate, high-precision maintenance to minimize tool downtime and production variability.

Lam Research has introduced Dextro, which the company claims is the semiconductor industry's first collaborative robot (cobot) designed to optimize critical maintenance tasks on wafer fabrication ...

On Tuesday, Lam Research introduced its Dextro collaborative robot (cobot), which promises to enable accurate and repeatable maintenance of fab tools. Typical wafer fabrication facilities house ...